Laser Micro-structuring of Sapphire Wafer and Fiber

機譯：藍寶石晶片和光纖的激光微結構

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Currently, sapphire is widely used in the field of optoelectronic devices and micro-mechanical components. One of the problems in using sapphire is the difficulty in cutting and micro-structuring due to the hardness of sapphire itself. In this paper, laser micromachining characteristics of sapphire are investigated using 157nm DUV laser micro-ablation system. Under laser fluence of 3-4 J/cm2, the maximum ablation rate could reach to 400nm/s. For 3D laser ablation, it is necessary to select a proper combination of process parameters. Several 3D micro-structures are produced in sapphire wafers and sapphire fibers. As a whole, the ablation equality is good for use.

機譯：目前，藍寶石已廣泛用于光電器件和微機械部件領域。使用藍寶石的問題之一是由于藍寶石本身的硬度而難以切割和微結構化。本文利用157nm DUV激光微燒蝕系統(tǒng)研究了藍寶石的激光微加工特性。在3-4 J / cm2的激光注量下，最大燒蝕速率可以達到400nm / s。對于3D激光燒蝕，必須選擇適當的工藝參數組合。在藍寶石晶片和藍寶石纖維中產生了幾種3D微觀結構。總體而言，消融均等性非常有用。

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來源
《Micromachining and microfabrication process technology XV》|2010年|P.75900O.1-75900O.8|共8頁
會議地點 San Francisco CA(US)
作者
Yutang DAI; rnGang Xu; rnJianlei Cui; rnFan Bai;
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作者單位

Key Laboratory of Fiber Optic Sensing Technology, Wuhan University of Technology, Wuhan, Hubei 430070, China;

rnKey Laboratory of Fiber Optic Sensing Technology, Wuhan University of Technology, Wuhan, Hubei 430070, China;

rnKey Laboratory of Fiber Optic Sensing Technology, Wuhan University of Technology, Wuhan, Hubei 430070, China;

rnKey Laboratory of Fiber Optic Sensing Technology, Wuhan University of Technology, Wuhan, Hubei 430070, China;

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原文格式 PDF
正文語種 eng
中圖分類微電子學、集成電路（IC）;
關鍵詞
deep ultraviolet laser; micro-structuring; 157nm laser; sapphire wafer; sapphire fiber;

機譯：深紫外激光微觀結構； 157nm激光;藍寶石晶片藍寶石纖維;

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1. Surface micro-structuring of Sapphire by a Q-switched DPSS nanosecond pulsed laser [J] . Materials science in semiconductor processing . 2020,第期

機譯：Q開關DPSS納秒脈沖激光器表面微結構化藍寶石
2. ULTRAFAST FIBER LASERS: Femtosecond fiber laser enables reliable wafer-level processing [J] . LAWRENCE SHAH, KIYOMI MONRO, GYU C. CHO Laser Focus World: The Magazine for the Photonics & Optoelectronics Industry . 2008,第12期

機譯：飛秒光纖激光器：飛秒光纖激光器可實現可靠的晶圓級處理
3. Structural and compositional characterization of MOVPE GaN thin films transferred from sapphire to glass substrates using chemical liftoff and room temperature direct wafer bonding and GaN wafer scale MOVPE growth on ZnO-buffered sapphire [J] . S. Gautier, T. Moudakir, G. Patriarche, Journal of Crystal Growth . 2013,第maya1期

機譯：使用化學剝離和室溫直接晶片鍵合以及GaN晶片規(guī)模在ZnO緩沖藍寶石上進行GaN晶片規(guī)模的MOVPE生長，從藍寶石轉移到玻璃基板的MOVPE GaN薄膜的結構和成分表征
4. Laser Micro-structuring of Sapphire Wafer and Fiber [C] . Yutang DAI, Gang Xu, Jianlei Cui, SPIE Conference on Micromachining and Microfabrication Process Technology . 2010

機譯：藍寶石晶圓和纖維的激光微結構
5. Optimised Ultrafast Laser Modulation with Spatial Light Modulators for Material Micro-Structuring [D] . Tang, Yue. 2020

機譯：具有空間光調制器的優(yōu)化超快激光調制，用于材料微結構
6. Multi-photon absorption enhancement by dual-wavelength double-pulse laser irradiation for efficient dicing of sapphire wafers [O] . Mindaugas Gedvilas, Justinas Mik?ys, Jonas Berzin?, -1

機譯：通過雙波長雙脈沖激光輻照增強多光子吸收有效切割藍寶石晶片
7. Laser Cleaving of Sapphire Wafer with Pre-Groove [O] . Takashi UEDA, Takahide MATSUNAGA, Tatsuaki FURUMOTO, 2013

機譯：用預槽的激光切割藍寶石晶圓
8. Growth of Sapphire Fibers with a CO Laser. [R] . Djeu, N. 1994

機譯：用CO激光生長藍寶石纖維。

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Laser Micro-structuring of Sapphire Wafer and Fiber

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