Multi-layer metal micromachining for THz waveguide fabrication

機譯：用于THz波導制造的多層金屬微加工

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Thick multi-layer metal stacking offers the potential for fabrication of rectangular waveguide components, including horn antennas, couplers, and bends, for operation at terahertz frequencies, which are too small to machine traditionally.rnAir-filled, TE10, rectangular waveguides for 3 THz operation were fabricated using two stacked electroplated gold layers on both planar and non-planar substrates. The initial layer of lithography and electroplating defined 37 micrometer tall waveguide walls in both straight and meandering geometries. The second layer, processed on top of the first, defined 33 micrometer thick waveguide lids. Release holes periodically spaced along the center of the lids improved resist clearing from inside of the electroformed rectangular channels. Processing tests of hollow structures on optically clear, lithium disilicate substrates allowed confirmation of resist removal by backside inspection.

機譯：厚的多層金屬堆疊為矩形波導管組件的制造提供了潛力，包括喇叭天線，耦合器和彎頭，以太赫茲頻率運行，太小了，傳統上無法加工?？諝馓畛涞腡E10,3 THz的矩形波導管使用在平面和非平面基板上的兩個堆疊的電鍍金層制造操作。光刻和電鍍的初始層在直的和曲折的幾何形狀中都定義了37微米高的波導壁。在第一層上加工的第二層限定了33微米厚的波導蓋。沿蓋的中心周期性間隔開的釋放孔改善了從電鑄矩形通道內部清除抗蝕劑的能力。在光學透明的二硅酸鋰基板上進行中空結構的加工測試，可以通過背面檢查確認抗蝕劑的去除。

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來源
《Micromachining and microfabrication process technology XV》|2010年|P.759009.1-759009.12|共12頁
會議地點 San Francisco CA(US)
作者
Adam Rowen; rnAndrew E. Hollowell; rnMichael Wanke; rnChristopher D. Nordquist; rnChristian Arrington; rnRusty Gillena; rnJonathan J. Coleman;
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Sandia National Laboratory, 1515 Eubank BLVD, Albuquerque, NM, USA 87123;

rnSandia National Laboratory, 1515 Eubank BLVD, Albuquerque, NM, USA 87123;

rnSandia National Laboratory, 1515 Eubank BLVD, Albuquerque, NM, USA 87123;

rnSandia National Laboratory, 1515 Eubank BLVD, Albuquerque, NM, USA 87123;

rnLMATA Government Services LLC, 4209 Balloon Park Road, Albuquerque, NM, 87109;

rn;

rnSandia National Laboratory, 1515 Eubank BLVD, Albuquerque, NM, USA 87123;

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原文格式 PDF
正文語種 eng
中圖分類微電子學、集成電路（IC）;
關鍵詞
multi-layer; metal; micromachining; three dimensional; THz; rectangular waveguide; quantum cascade laser; electrochemical deposition; plating; electroplating;

機譯：多層金屬;微加工三維太赫茲矩形波導量子級聯激光器電化學沉積電鍍;電鍍;

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1. All-metal micromachining for the fabrication of sub-millimetre and THz waveguide components and circuits [J] . V. Desmaris, D. Meledin, A. Pavolotsky, Journal of Micromechanics and Microengineering . 2008,第9期

機譯：用于亞毫米和太赫茲波導組件和電路制造的全金屬微加工
2. Properties of Surface Metal Micromachined Rectangular Waveguide Operating Near 3 THz [J] . Nordquist C. D.Wanke M. C.Rowen A. M.Arrington C. L.Grine A. D.Fuller C. T. Selected Topics in Quantum Electronics, IEEE Journal of . 2011,第1期

機譯：在3 THz附近工作的表面金屬微加工矩形波導的特性
3. Integral fabrication of terahertz hollow-core metal rectangular waveguides with a combined process using wire electrochemical micromachining, electrochemical deposition, and selective chemical dissolution [J] . Bi Xiaolei, Zeng Yongbin, Dai Xingda, The International Journal of Advanced Manufacturing Technology . 2020,第3a4期

機譯：用電化有線微機械線，電化學沉積和選擇性化學溶解的組合工藝的太赫茲中空芯金屬矩形波導的整體制造
4. Multi-layer metal micromachining for THz waveguide fabrication [C] . Adam Rowen, Andrew E. Hollowell, Michael Wanke, SPIE Conference on Micromachining and Microfabrication Process Technology . 2010

機譯：用于THz波導制造的多層金屬微機械
5. THz Quantum Cascade Lasers: Simulation of GaN-Based Active Regions and Fabrication of Integrated Waveguide Probes. [D] . Naghibi Mahmoudabadi, Partia. 2013

機譯：THz量子級聯激光器：基于GaN的有源區的仿真和集成波導探頭的制造。
6. Subwavelength metallic waveguides as a tool for extreme confinement of THz surface waves [O] . D. Gacemi, J. Mangeney, R. Colombelli, -1

機譯：亞波長金屬波導作為極端限制THz表面波的工具
7. Silicon micromachined waveguide components at 0.75 to 1.1 THz [O] . Reck Theodore, Jung-Kubiak Cecile, Leal Sevillano Carlos Alberto, 2014

機譯：0.75至1.1 THz的硅微加工波導組件

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Multi-layer metal micromachining for THz waveguide fabrication

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