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Alternative technology for fabrication of nano- or microstructured mould inserts used for optical components

機譯：制造用于光學組件的納米或微結構模具嵌件的替代技術

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For mass production of multiscale-optical components, micro- and nanostructured moulding tools are needed. Metal tools are used for hot embossing or injection moulding of microcomponents in plastics. Tools are typically produced by classical forming processes such as mechanical manufacturing e.g. turning or milling, laser manufacturing or electrical discharge machining (EDM). Microstructures with extremely tight specifications, e.g. low side wall roughness and high aspect ratios are generally made by lithographic procedures such as LIGA or DPW technology. However, these processes are unsuitable for low-cost mass production. They are limited by the exposure area and structure design. In cooperation with international partners alternative manufacturing methods of moulding tools have been developed at the Institute of Microstructure Technology (IMT). In a new replication procedure, mould inserts are fabricated using micro- and nanoscale optics. The multiscale structured prototypes, either in plastics, glass, metal or material combinations are used as sacrificial parts. Using joining technology, electroforming and EDM technology, a negative copy of a prototype is transferred into metal to be used as a moulding tool. The benefits of this replication technique are rapid and economical production of moulding tools with extremely precise micro- and nanostructures, large structured area and long tool life. Low-cost mass replication is possible with these moulding tools. In this paper, an established manufacturing chain will be presented. Multiscale and multimaterial optical prototypes e.g. out-of-plane coupler or microinterferometer were made by DPW or laser technology. The mould insert fabrication of each individual manufacturing step will be shown. The process reliability and suitability for mass production was tested by hot embossing.
機譯：為了大規模生產多尺度光學組件，需要微米和納米結構的成型工具。金屬工具用于對塑料中的微組件進行熱壓花或注塑成型。工具通常是通過經典的成形工藝，例如機械制造，例如機械加工來生產的。車削或銑削，激光制造或電火花加工（EDM）。規格極其嚴格的微結構，例如通常通過諸如LIGA或DPW技術的光刻工藝來制造低側壁粗糙度和高縱橫比。但是，這些工藝不適用于低成本的批量生產。它們受到暴露區域和結構設計的限制。通過與國際合作伙伴的合作，微結構技術研究所（IMT）已開發出成型工具的替代制造方法。在新的復制程序中，使用微米和納米級光學器件制造模具嵌件。塑料，玻璃，金屬或材料組合的多尺度結構原型用作犧牲零件。使用連接技術，電鑄和EDM技術，將原型的負片復制到金屬中以用作成型工具。這種復制技術的好處是可以快速，經濟地生產具有極其精確的微米和納米結構，較大的結構化面積和較長的模具壽命的成型模具。這些成型工具可以實現低成本的批量復制。在本文中，將介紹已建立的制造鏈。多尺度和多材料光學原型平面外耦合器或微干涉儀是通過DPW或激光技術制造的。將顯示每個單獨制造步驟的模具嵌件制造。通過熱壓印測試了工藝的可靠性和批量生產的適用性。

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