MANUFACTURABILITY OF GAS SENSOR WITH ZnO NANOPARTICLES SUSPENSION DEPOSITED BY INK JET PRINTING

機(jī)譯：噴墨印刷沉積的ZnO納米顆粒懸浮氣體傳感器的可制造性

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Zinc oxide is used in many applications thanks to its various characteristics as well as photoresistivity, piezoelectricity, wide band gap for power components but also its capability for gas detection. In this article, we first present new process based on ZnO nanoparticles from Sigma Aldrich manufacturer; a stable ink obtained by mixing 10% weight of commercial powder with ethylene glycol, has been deposited by ink-jet printing on a silicon oxide substrate covered by platinum interdigitated electrodes. To obtain homogeneous deposits of nanoparticles, the working area of the sensor was bounded by functionalisation by the n-Octadecyltrichlorosilane. These deposits were optimized at 65 ℃. Then, the study was focused on the correlation between parameters of deposit and global resistance and gas sensitivity: conductivity for different operating temperatures under methane and isopropyl alcohol vapours. The best results have been obtained for thicknesses in the range of 0.5 and 2.5 μm. The ZnO resistance is stable under gas from 200℃ and the relative sensitivity to methane and isopropyl alcohol are maximum and opposite at 225℃ and 300℃ respectively. This work shows that ink-jet is a promising technique to manufacture a new generation of low cost gas sensors at lower temperature deposition.

機(jī)譯：氧化鋅因其各種特性以及光阻性，壓電性，功率組件的寬帶隙以及氣體檢測能力而被用于許多應(yīng)用中。在本文中，我們首先介紹了基于Sigma Aldrich制造商的ZnO納米顆粒的新工藝。一種穩(wěn)定的油墨，它是通過將10％的市售粉末與乙二醇混合而獲得的，已通過噴墨印刷法沉積在被鉑指狀電極覆蓋的氧化硅基底上。為了獲得均勻的納米顆粒沉積物，傳感器的工作區(qū)域由正十八烷基三氯硅烷的功能化作用限制。這些沉積物在65℃下進(jìn)行了優(yōu)化。然后，研究集中于沉積物參數(shù)與整體電阻和氣體敏感性之間的相關(guān)性：甲烷和異丙醇蒸氣下不同工作溫度下的電導(dǎo)率。對于厚度在0.5到2.5μm的范圍，已經(jīng)獲得了最好的結(jié)果。 ZnO電阻在200℃以下的氣體中穩(wěn)定，對甲烷和異丙醇的相對靈敏度最大，分別在225℃和300℃時相對。這項工作表明，噴墨技術(shù)是一種在較低的溫度沉積條件下生產(chǎn)新一代低成本氣體傳感器的有前途的技術(shù)。

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來源
《Micromachining and microfabrication process technology XV》|2010年|P.75900M.1-75900M.9|共9頁
會議地點 San Francisco CA(US)
作者
V. Conedera; rnP. Yoboue; rnF. Mesnilgrente; rnN. Fabre; rnP. Menini;
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作者單位

CNRS-LAAS, Laboratoire d'Analyse et d'Architecture des Systemes, 7 av. Colonel Roche F-31077 Toulouse, France Universite de Toulouse, UPS, INP, INSA, ISAE, Toulouse, France;

rnCNRS-LAAS, Laboratoire d'Analyse et d'Architecture des Systemes, 7 av. Colonel Roche F-31077 Toulouse, France Universite de Toulouse, UPS, INP, INSA, ISAE, Toulouse, France;

rnCNRS-LAAS, Laboratoire d'Analyse et d'Architecture des Systemes, 7 av. Colonel Roche F-31077 Toulouse, France Universite de Toulouse, UPS, INP, INSA, ISAE, Toulouse, France;

rnCNRS-LAAS, Laboratoire d'Analyse et d'Architecture des Systemes, 7 av. Colonel Roche F-31077 Toulouse, France Universite de Toulouse, UPS, INP, INSA, ISAE, Toulouse, France;

rnCNRS-LAAS, Laboratoire d'Analyse et d'Architecture des Systemes, 7 av. Colonel Roche F-31077 Toulous;

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原文格式 PDF
正文語種 eng
中圖分類微電子學(xué)、集成電路（IC）;
關(guān)鍵詞
ink-jet printing; gas sensor; zinc oxide nanoparticles; surface functionalization;

機(jī)譯：噴墨印刷；氣體傳感器氧化鋅納米粒子；表面功能化;

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4. MANUFACTURABILITY OF GAS SENSOR WITH ZnO NANOPARTICLES SUSPENSION DEPOSITED BY INK JET PRINTING [C] . V. Conedera, P. Yoboue, F. Mesnilgrente, SPIE Conference on Micromachining and Microfabrication Process Technology . 2010

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MANUFACTURABILITY OF GAS SENSOR WITH ZnO NANOPARTICLES SUSPENSION DEPOSITED BY INK JET PRINTING

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