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Linear equation wafer transfer system

機譯:線性方程式晶圓傳輸系統

摘要

(57) [Abstract] wafer transfer system (10), and operates along with side-mounted wafer carrier or front (12), one position in a straight line from the (12) the carrier wafer with one or more (24), That is moved to a position for receiving the further processing by the wafer is moved along a straight line the same. The transfer system (10), wafer extractor plural sets using (34) finger paired and Placement sized wafers stacked away (12) in the carrier (24) between (30) I provide. Once inserted wafer (24) during, and can then be moved in the vertical direction slightly to raise the wafer from the shoulder carrier (12) finger (34). Finger support (24) a wafer (34) is able to move in a generally horizontal direction along one straight line, removing (24) from the wafer (12) carrier. Finger (34) is supported by one support structure. In this support structure, such clearance can pass through the wafer support structure along a linear path as above for further processing is provided.
機譯:(57)[摘要]晶片傳送系統(10),并與側面安裝的晶片承載器或前部(12)一起在具有(一個)或多個晶片(24)的晶片承載器(12)的直線位置上工作,將其移動到用于接受晶片的進一步處理的位置,使該晶片沿著同一直線移動。傳送系統(10),使用(34)個成對的晶片提取器(多組)和在(30)之間的托架(24)中堆疊放置的(12)大小的晶片。一旦將晶片(24)插入,然后可以在垂直方向上稍微移動,以使晶片從肩托(12)的手指(34)升起。手指支撐件(24)使晶片(34)能夠沿著一條直線在大體水平的方向上移動,從而從晶片(12)載體上移走(24)。指狀件(34)由一個支撐結構支撐。在該支撐結構中,這種間隙可以沿著如上所述的線性路徑穿過晶片支撐結構,以用于進一步處理。

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