Graphene-Si Heterogeneous Nanotechnology

機譯：石墨烯-硅異質納米技術

獲取原文

獲取原文并翻譯 | 示例

頁面導航

摘要
著錄項
引文網絡
相似文獻
相關主題

摘要

It is widely envisioned that graphene, an atomic sheet of carbon that has generated very broad interest has the largest prospects for flexible smart systems and for integrated graphene-silicon (G-Si) heterogeneous very large-scale integrated (VLSI) nanoelectronics. In this work, we focus on the latter and elucidate the research progress that has been achieved for integration of graphene with Si-CMOS including: wafer-scale graphene growth by chemical vapor deposition on Cu/SiO_2/Si substrates, wafer-scale graphene transfer that afforded the fabrication of over 10,000 devices, wafer-scalable mitigation strategies to restore graphene's device characteristics via fluoropolymer interaction, and demonstrations of graphene integrated with commercial Si-CMOS chips for hybrid nanoelectronics and sensors. Metrology at the wafer-scale has led to the development of custom Raman processing software (GRISP) now available on the nanohub portal. The metrology reveals that graphene grown on 4-in substrates have monolayer quality comparable to exfoliated flakes. At room temperature, the high-performance passivated graphene devices on SiO_2/Si can afford average mobilities 3000cm~2/V-s and gate modulation that exceeds an order of magnitude. The latest growth research has yielded graphene with high mobilities greater than 10,000cm~2/V-s on oxidized silicon. Further progress requires track-compatible graphene-Si integration via wafer bonding in order to translate graphene research from basic to applied research in commercial R&D laboratories to ultimately yield a viable nanotechnology.

機譯：人們普遍認為，石墨烯是一種已引起廣泛關注的碳原子片，在柔性智能系統和集成石墨烯-硅（G-Si）異質超大規模集成（VLSI）納米電子學方面具有最大的前景。在這項工作中，我們將重點放在后者上，并闡明了石墨烯與Si-CMOS集成所取得的研究進展，包括：通過在Cu / SiO_2 / Si襯底上進行化學氣相沉積來生長晶圓級石墨烯，晶圓級石墨烯轉移提供了10,000多種器件的制造，可通過晶圓縮放的緩解策略，通過含氟聚合物的相互作用來恢復石墨烯的器件特性，并演示了石墨烯與用于混合納米電子和傳感器的商用Si-CMOS芯片集成在一起的情況。晶圓級的計量技術導致開發了可在nanohub門戶上使用的定制拉曼處理軟件（GRISP）。計量結果表明，在4英寸底材上生長的石墨烯具有可與片狀薄片媲美的單層質量。在室溫下，基于SiO_2 / Si的高性能鈍化石墨烯器件可提供3000cm?2 / V-s的平均遷移率和超過一個數量級的柵極調制。最新的生長研究已經產生了在氧化硅上具有大于10,000cm?2 / V-s的高遷移率的石墨烯。進一步的進步需要通過晶圓鍵合實現軌道兼容的石墨烯-Si集成，以便將石墨烯研究從基礎上轉化為商業研發實驗室中的應用研究，從而最終產生可行的納米技術。

著錄項

來源
《Micro- and nanotechnology sensors, systems, and applications V ; Flexible electronics》|2013年|872504.1-872504.7|共7頁
會議地點 Baltimore MD(US)
作者
Deji Akinwande; Li Tao;
展開▼
作者單位

Microelectronics Research Center, Department of Electrical and Computer Engineering, The University of Texas at Austin, Austin, TX 78758;

Microelectronics Research Center, Department of Electrical and Computer Engineering, The University of Texas at Austin, Austin, TX 78758;

展開▼
會議組織
原文格式 PDF
正文語種 eng
中圖分類
關鍵詞
Wafer-scale graphene; Raman metrology; Si CMOS; transistor; mobility; on/off ratio;

機譯：晶圓級石墨烯；拉曼計量Si CMOS;晶體管流動性開/關比;

相似文獻

外文文獻
中文文獻
專利

1. Monolithic Heterogeneous Integration of 3D Radio Frequency L-C Elements by Self-Rolled-Up Membrane Nanotechnology [J] . Yang Zhendong, Kraman Mark D., Zheng Zhuoyuan, Advanced Functional Materials . 2020,第40期

機譯：自軋膜納米技術三維射頻L-C元素的單片異構整合
2. Food values and heterogeneous consumer responses to nanotechnology [J] . Yang Yang, Hobbs Jill E. Canadian Journal of Agricultural Economics . 2020,第3期

機譯：對納米技術的食品價值和異質消費者反應
3. Heterogeneous Consumer Preferences for Nanotechnology and Genetic-modification Technology in Food Products [J] . Yue, Chengyan, Zhao, Shuoli, Kuzma, Jennifer Journal of Agricultural Economics . 2015,第2期

機譯：食品中納米技術和基因改造技術的異類消費者偏好
4. Graphene-Si Heterogeneous Nanotechnology [C] . Deji Akinwande, Li Tao Conference on micro- and nanotechnology sensors, systems, and applications V . 2013

機譯：graph E呢-SI heterogeneous nanotechnology
5. Nanotechnology and food: The perception and level of acceptance of nanotechnology use in foods. [D] . Kim, Melanie Sunkyung. 2014

機譯：納米技術和食品：食品中納米技術用途的認識和接受程度。
6. Nanotechnology in Medicine: Nanotechnology in Medicine: Nanofilm Biomaterials [O] . Paul R. Van Tassel 2013

機譯：醫學上的納米技術：醫學上的納米技術：納米膜生物材料
7. A Strategy for High-Performance Photodetector based on Graphene-Si heterostructure [O] . Tianying He, Changyong Lan, Chun Li, 2020

機譯：基于石墨烯-SI異質結構的高性能光電探測器的策略

免费精品视频一区二区三区学生,被3个黑人老外玩的4p,人妻精品无码中文无码一区无,添女人荫蒂全部过

Graphene-Si Heterogeneous Nanotechnology

摘要

著錄項

引文網絡

相似文獻

相關主題

期刊訂閱