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首頁> 外文會議>Micro- and nanotechnology sensors, systems, and applications V ; Flexible electronics >Metal oxide nanowire gas sensors for indoor and outdoor environmental monitoring
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Metal oxide nanowire gas sensors for indoor and outdoor environmental monitoring

機譯:用于室內和室外環境監測的金屬氧化物納米線氣體傳感器

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摘要

We present performance results of SnO_2 and CuO nanowire gas sensor devices, where single and multi-nanowire device configurations have been employed in order to optimize sensor design. In particular the response to the target gases CO, H_2, and H_2S has been measured in dry and humid air; both the SnO_2 and CuO nanowire sensors are able to detect CO in the low ppm concentration range, which is important for environmental monitoring. The CuO multi-nanowire devices show an extraordinary high response to H_2S with sensitivity in the low ppb concentration. We present our developments of CMOS technology based micro-hotplates, which are employed as platform for gas sensitive thin films and nanowires. Potential heterogeneous integration of nanowires on the micro-hotplate chips as well as an approach towards gas sensor arrays is discussed. We conclude that CMOS integrated multi-nanowire gas sensors are highly promising candidates for the practical realization of multi-parameter sensor devices for indoor and outdoor environmental monitoring.
機譯:我們介紹了SnO_2和CuO納米線氣體傳感器設備的性能結果,其中采用了單納米線和多納米線設備配置以優化傳感器設計。特別是在干燥和潮濕的空氣中測量了對目標氣體CO,H_2和H_2S的響應。 SnO_2和CuO納米線傳感器都能夠檢測低ppm濃度范圍內的CO,這對于環境監測非常重要。 CuO多納米線器件在低ppb濃度下顯示出對H_2S的非凡高響應性。我們介紹了基于CMOS技術的微熱板的發展,該微熱板被用作氣體敏感薄膜和納米線的平臺。討論了納米線在微熱板芯片上的潛在異構集成,以及對氣體傳感器陣列的研究方法。我們得出結論,CMOS集成多納米線氣體傳感器是用于室內和室外環境監測的多參數傳感器設備的實際實現的極有希望的候選者。

著錄項

  • 來源
  • 會議地點 Baltimore MD(US)
  • 作者單位

    AIT Austrian Institute of Technology GmbH, Health Environment Department, Donau-City- Strasse 1, 1220 Vienna, Austria;

    AIT Austrian Institute of Technology GmbH, Health Environment Department, Donau-City- Strasse 1, 1220 Vienna, Austria;

    Siemens AG, Corporate Research and Technologies, 81739 Munich, Germany;

    University of Applied Sciences Wiener Neustadt, Johannes Gutenberg-Strasse 3, 2700 Wiener Neustadt, Austria;

    ams AG, Tobelbader Strasse 30, 8141 Unterpremstaetten, Austria;

    AIT Austrian Institute of Technology GmbH, Health Environment Department, Donau-City- Strasse 1, 1220 Vienna, Austria;

    AIT Austrian Institute of Technology GmbH, Health Environment Department, Donau-City- Strasse 1, 1220 Vienna, Austria;

    University of Applied Sciences Wiener Neustadt, Johannes Gutenberg-Strasse 3, 2700 Wiener Neustadt, Austria;

    ams AG, Tobelbader Strasse 30, 8141 Unterpremstaetten, Austria;

    ams AG, Tobelbader Strasse 30, 8141 Unterpremstaetten, Austria;

    University of Applied Sciences Wiener Neustadt, Johannes Gutenberg-Strasse 3, 2700 Wiener Neustadt, Austria;

    ams AG, Tobelbader Strasse 30, 8141 Unterpremstaetten, Austria;

    AIT Austrian Institute of Technology GmbH, Health Environment Department, Donau-City- Strasse 1, 1220 Vienna, Austria;

    ams AG, Tobelbader Strasse 30, 8141 Unterpremstaetten, Austria;

  • 會議組織
  • 原文格式 PDF
  • 正文語種 eng
  • 中圖分類
  • 關鍵詞

    Gas sensors; nanowires; tin oxide; cupric oxide; CMOS; micro-hotplates; heterogeneous integration;

    機譯:氣體傳感器;納米線;氧化錫氧化銅CMOS;微型電爐異構整合;

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